The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Oct. 08, 2003
Wolf-dieter Domke, Adelsdorf, DE;
Larissa Juschkin, Herzogenrath, DE;
Karl Kragler, Erlangen, DE;
Rainer Lebert, Kelmis, BE;
Manfred Meisen, Aachen, DE;
Wolf-Dieter Domke, Adelsdorf, DE;
Larissa Juschkin, Herzogenrath, DE;
Karl Kragler, Erlangen, DE;
Rainer Lebert, Kelmis, BE;
Manfred Meisen, Aachen, DE;
Qimonda AG, Munich, DE;
AIXUV GmbH, Aachen, DE;
Abstract
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.