The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Dec. 29, 2005
Xiaoyi Ding, Lake Zurich, IL (US);
John P. Schuster, Grayslake, IL (US);
Xiaoyi Ding, Lake Zurich, IL (US);
John P. Schuster, Grayslake, IL (US);
Temic Automotive of North America, Inc., Deer Park, IL (US);
Abstract
A microdevice () having a hermetically sealed cavity () to house a microstructure (). The microdevice () comprises a substrate (), a cap (), an isolation layer (), at least one conductive island (), and an isolation trench (). The substrate () has a top side () with a plurality of conductive traces () formed thereon. The conductive traces () provide electrical connection to the microstructure (). The cap () has a base portion () and a sidewall (). The sidewall () extends outwardly from the base portion () to define a recess () in the cap (). The isolation layer () is attached between the sidewall () of the cap () and the plurality of conductive traces (). The conductive island () is attached to at least one of the plurality of conductive traces (). The isolation trench () is positioned between the cap () and the conductive island () and may be unfilled or at least partially filled with an electrically isolating material. There is also a method of making the same microdevice.