The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Dec. 28, 2005
Jin-sung Lee, Seoul, KR;
Dong-woo Lee, Seoul, KR;
Tae-gyu Kim, Hwaseong-si, KR;
Tae-sang Park, Suwon-si, KR;
Bang-weon Lee, Yongin-si, KR;
Jong-kill Lim, Hwaseong-si, KR;
Chang-hoon Jung, Seoul, KR;
Sang-kwon Wee, Hwaseong-si, KR;
Jin-sung Lee, Seoul, KR;
Dong-woo Lee, Seoul, KR;
Tae-gyu Kim, Hwaseong-si, KR;
Tae-sang Park, Suwon-si, KR;
Bang-weon Lee, Yongin-si, KR;
Jong-kill Lim, Hwaseong-si, KR;
Chang-hoon Jung, Seoul, KR;
Sang-kwon Wee, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A semiconductor wafer baking apparatus includes a hot plate, a container of which an upper part is open, and a cover that covers the upper part of the container. The cover includes an upper plate, a lower plate and a side wall that form a gas circulating space therebetween. At least one gas inlet is formed in the side wall, a plurality of gas supply holes are formed in a central region of the lower plate, and a skirt on which is formed a gas exhaust unit is coupled to a lower edge of the cover.