The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Feb. 14, 2006
Zvonimir Z. Bandic, San Jose, CA (US);
Tsai-wei Wu, San Jose, CA (US);
Zvonimir Z. Bandic, San Jose, CA (US);
Tsai-Wei Wu, San Jose, CA (US);
Hitachi Global Storage Technologies, Amsterdam, NL;
Abstract
A nanoimprinting configuration includes a UV light diffuser that randomizes a collimated UV light beam so as to diffuse the shadowing effect from any defect object that resides in the UV optical path. In addition, a combination center circular pad and outer ring-shaped pad form a donut-shaped 'non-contact' area between the two pad pieces. The size and shape of the two pad combination are designed to avoid direct gel pad contact above the patterned imprint zone on the disk substrate. The purpose of the gel pad, non-contact configuration is to eliminate any possible surface deformation incurred along the loading column and thereby avoid the elastic propagation of any deformations to the stamper resist surface.