The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Jan. 20, 2006
Ko Ishizuka, Omiya, JP;
Hidejiro Kadowaki, Yokohama, JP;
Yasushi Kaneda, Urawa, JP;
Shigeki Kato, Utsunomiya, JP;
Takayuki Kadoshima, Utsunomiya, JP;
Sakae Horyu, Tokyo, JP;
Ko Ishizuka, Omiya, JP;
Hidejiro Kadowaki, Yokohama, JP;
Yasushi Kaneda, Urawa, JP;
Shigeki Kato, Utsunomiya, JP;
Takayuki Kadoshima, Utsunomiya, JP;
Sakae Horyu, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them. The wave fronts of the linearly polarized light beams are superposed one upon the others. A light dividing member divides the light beams superposed one upon the other by the optical system into a plurality of light beams. A polarizing plate takes out each light beam with a 45° polarized component, and a plurality of light receiving elements individually receive the light beams taken out by the polarizing plate.