The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Dec. 03, 2004
Jung Jin Park, Beltsville, MD (US);
Reza Ghodssi, Rockville, MD (US);
Gary W. Rubloff, Clarksville, MD (US);
Mark Joseph Kastantin, Goleta, CA (US);
Sheng LI, Greenbelt, MD (US);
Li-qun Wu, N. Potomac, MD (US);
Hyunmin Yi, Beltsville, MD (US);
Theresa Michelle Valentine, Potomac, MD (US);
Jung Jin Park, Beltsville, MD (US);
Reza Ghodssi, Rockville, MD (US);
Gary W. Rubloff, Clarksville, MD (US);
Mark Joseph Kastantin, Goleta, CA (US);
Sheng Li, Greenbelt, MD (US);
Li-Qun Wu, N. Potomac, MD (US);
Hyunmin Yi, Beltsville, MD (US);
Theresa Michelle Valentine, Potomac, MD (US);
University of Maryland Biotechnology Institute, Baltimore, MD (US);
University of Maryland, College Park, College Park, MD (US);
Abstract
A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.