The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Apr. 17, 2006
Applicants:
Min-woo Lee, Pyeongtaek-si, KR;
Hyung Suk Ahn, Seoul, KR;
Sung-min Lee, Seoul, KR;
Inventors:
Assignee:
Komico Ltd., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/581 (2006.01); C04B 35/582 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provide a high dense aluminum nitride sintered body, a preparing method thereof, and a member for manufacturing semiconductor using the sintered body which has excellent leakage current characteristic, enough adsorbing property, good detachment property and excellent thermal conductivity and so can be applied to even a member for manufacturing semiconductor requiring high volume resistivity like the coulomb type electrostatic chucks as well as the Johnsen-Rahbek type electrostatic chucks.