The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Jun. 28, 2004
Len Hom, Dublin, CA (US);
John D. Mize, Spokane Valley, WA (US);
Robert M. Prater, Los Altos, CA (US);
David K. Chan, San Francisco, CA (US);
Gilbert Amador, Dublin, CA (US);
Peter J. Kang, San Jose, CA (US);
Len Hom, Dublin, CA (US);
John D. Mize, Spokane Valley, WA (US);
Robert M. Prater, Los Altos, CA (US);
David K. Chan, San Francisco, CA (US);
Gilbert Amador, Dublin, CA (US);
Peter J. Kang, San Jose, CA (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.