The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Sep. 30, 2005
Applicants:
Kevin J. Engler, Freeport, IL (US);
Jamie W. Speldrich, Freeport, IL (US);
Inventors:
Kevin J. Engler, Freeport, IL (US);
Jamie W. Speldrich, Freeport, IL (US);
Assignee:
Honeywell International Inc., Morristown, NJ (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/02 (2006.01); G01N 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A humidity sensing apparatus and method include a substrate and a MEMS structure, wherein the MEMS structure is supported by the substrate. The MEMS structure comprises a humidity-sensitive material in association with a movable member such that when the humidity-sensitive material changes with humidity, the MEMS structure moves the movable member, thereby providing an indication of humidity based on a stress within the MEMS structure.