The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Oct. 20, 2006
Applicant:
Toshihiko Tanaka, Yokohama, JP;
Inventor:
Toshihiko Tanaka, Yokohama, JP;
Assignee:
Olympus Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
Abstract
A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable incident angle, and a light-receiving section that receives light from the substrate irradiated with illumination light from the illumination section with a variable detection angle. The light-receiving section receives diffracted light emitted in substantially the same direction as the direction of incidence of the illumination light from the illumination section.