The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Apr. 08, 2005
Applicants:
Morteza Zandi, Shrewsbury, MA (US);
Ara Vartabedian, Hudson, MA (US);
Brian Lacourse, Pepperell, MA (US);
Inventors:
Morteza Zandi, Shrewsbury, MA (US);
Ara Vartabedian, Hudson, MA (US);
Brian LaCourse, Pepperell, MA (US);
Assignee:
Saint-Gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01T 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.