The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
May. 02, 2005
Yasunori Ikeno, Cupertino, CA (US);
Shunsuke Kurata, Kamiina-gun, JP;
Katsuyuki Hashimoto, Tokyo, JP;
Masahiko Yazawa, Tokyo, JP;
Yasunori Ikeno, Cupertino, CA (US);
Shunsuke Kurata, Kamiina-gun, JP;
Katsuyuki Hashimoto, Tokyo, JP;
Masahiko Yazawa, Tokyo, JP;
Olympus Corporation, Tokyo, JP;
Abstract
It is an object of the present invention to provide a substrate processing apparatus, comprising a housing body mounting unit that is capable of mounting a plurality of housing bodies which can house a plurality of substrates, a processing apparatus main body for processing a substrate extracted from the housing body, a transportation unit for transporting the substrate between the housing body and the processing apparatus main body, a processing control unit for controlling the transportation unit and making it transport the substrate between the housing body and the processing apparatus main body, and a transportation control unit for controlling the transportation unit and making it transport the substrate from one housing body to another housing body without passing through the processing apparatus main body.