The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Apr. 19, 2004
Eric Connor, Los Gatos, CA (US);
James P. Godschalx, Midland, MI (US);
Craig J. Hawker, Los Gatos, CA (US);
James L. Hedrick, Pleasanton, CA (US);
Victor Yee-way Lee, San Jose, CA (US);
Teddie P. Magbitang, San Jose, CA (US);
Robert D. Miller, San Jose, CA (US);
Q. Jason Niu, Midland, MI (US);
Willi Volksen, San Jose, CA (US);
Eric Connor, Los Gatos, CA (US);
James P. Godschalx, Midland, MI (US);
Craig J. Hawker, Los Gatos, CA (US);
James L. Hedrick, Pleasanton, CA (US);
Victor Yee-Way Lee, San Jose, CA (US);
Teddie P. Magbitang, San Jose, CA (US);
Robert D. Miller, San Jose, CA (US);
Q. Jason Niu, Midland, MI (US);
Willi Volksen, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Dow Global Technologies, Inc., Midland, MI (US);
Abstract
A low-k organic dielectric material having stable nano-sized porous is provided as well as a method of fabricating the same. The porous low-k organic dielectric material is made from a composition of matter having a vitrification temperature (Tv-comp) which includes a b-staged thermosetting resin having a vitrification temperate (Tv-resin), a pore generating material, and a reactive additive. The reactive additive lowers Tv-comp below Tv-resin.