The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Aug. 18, 2005
Applicant:
IN Kwon Jeong, Cupertino, CA (US);
Inventor:
In Kwon Jeong, Cupertino, CA (US);
Assignee:
InoPla Inc, San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B 51/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method for polishing objects, such as semiconductor wafers, utilizes pivotable load/unload cups to transfer the objects to object carriers to polish the objects on at least one polishing surface. The pivoting axes of the pivotable load/unload cups are located between the object carriers.