The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Jun. 01, 2005
Kenji Nagasawa, Tokyo, JP;
Ayumu Sakamoto, Tokyo, JP;
Takahiro Shimada, Tokyo, JP;
Nagano Keiki Co., Ltd., Tokyo, JP;
Abstract
A pressure sensor module, wherein a holding spaceis formed between a diaphragmand a thin film layer, and a vent holecommunicating with the exterior of a first case is provided in the holding space. In the above pressure sensor module, even when a corrosive gas or chemical solution is used as a fluid to be measured and a corrosive gas component originated from the fluid to be measured permeates into the holding space, the permeated corrosive gas component can be discharged to the outside of the case through the vent hole. As a result, the corrosion of the diaphragmby the fluid to be measured can be prevented, which results in the achievement of a prolonged service life of the pressure sensor module