The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Jun. 19, 2006
Yasunori Ando, Kyoto, JP;
Masatoshi Onoda, Kyoto, JP;
Yasunori Ando, Kyoto, JP;
Masatoshi Onoda, Kyoto, JP;
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Abstract
This vacuum processing apparatus has a fixed processing chamberand two movable load lock chambersand. A gate valveis provided on the processing chamberand gate valvesare respectively provided on the load lock chambersand. Each of the load lock chambersandis moved in a Y direction by a preparatory chamber moving mechanismA vacuum sealwhich is expandable and shrinkable so as to vacuum seal a gap G between the gate valvesandwhich are set close to each other during the expansion, is provided around a peripheral edge portion of the processing chamber gate valveFurther, a substrate transporting mechanism for transporting a substratebetween the processing chamberand each of the load lock chambersandset close thereto.