The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2008

Filed:

Apr. 21, 2005
Applicants:

William H. Steier, San Marino, CA (US);

Hyun-chae Song, Burbank, CA (US);

Min-cheol OH, Busan, KR;

Seh-won Ahn, Seoul, KR;

Inventors:

William H. Steier, San Marino, CA (US);

Hyun-Chae Song, Burbank, CA (US);

Min-Cheol Oh, Busan, KR;

Seh-Won Ahn, Seoul, KR;

Assignee:

University of Southern California, Los Angeles, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/035 (2006.01); G02F 1/295 (2006.01); H01L 21/70 (2006.01);
U.S. Cl.
CPC ...
Abstract

An electro-optic modulator is formed from all flexible materials, to form a flexible electro-optic modulator. The formation process uses a photoresist which selectively adheres to one material more than it adheres to another material. This allows selective liftoff, where only parts of the substrate are lifted off. For example, this allows silicon ends on the modulator, thereby facilitating pig tailing and also facilitates handling. Another aspect describes testing the bending radius.


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