The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Sep. 15, 2004
Michael Kröll, Geinhausen, DE;
Günther Michael, Karlstein, DE;
Rainer Hahn, Büdingen, DE;
Stipan Katusic, Kelkheim, DE;
Stefan Heberer, Gelnhausen, DE;
Ralph Brandes, Princeton, NJ (US);
Michael Kröll, Geinhausen, DE;
Günther Michael, Karlstein, DE;
Rainer Hahn, Büdingen, DE;
Stipan Katusic, Kelkheim, DE;
Stefan Heberer, Gelnhausen, DE;
Ralph Brandes, Princeton, NJ (US);
Degussa AG, Dusseldorf, DE;
Abstract
A dispersion of pyrogenically produced cerium oxide, which does not contain any particles larger than 1 μm, is produced by dispersing a pyrogenically produced cerium oxide in water by means of a dissolver, centrifuging it, separating the supernatant from the bottom product, and again dispersing the supernatant by means of ultrasound. The dispersion can be used for chemical-mechanical polishing (CMP).