The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
May. 28, 2004
Byoung-gue Min, Daejeon, KR;
Kyung-ho Lee, Daejeon, KR;
Seong-il Kim, Daejeon, KR;
Jong-min Lee, Daejeon, KR;
Chul-won Ju, Daejeon, KR;
Byoung-Gue Min, Daejeon, KR;
Kyung-Ho Lee, Daejeon, KR;
Seong-Il Kim, Daejeon, KR;
Jong-Min Lee, Daejeon, KR;
Chul-Won Ju, Daejeon, KR;
Abstract
Disclosed are a heterojunction bipolar transistor and a method of fabricating the same. A first dielectric layer easily etched is deposited on the overall surface of a substrate before an isolation region is defined. The first dielectric layer and a sub-collector layer are selectively etched, and then a second dielectric layer etched at a low etch rate is deposited on the overall surface of the substrate. Via holes are formed in the first and second dielectric layers, and then the first dielectric layer is removed using a difference between etch characteristics of the first and second dielectric layers. Accordingly, a reduction in power gain, generated at the interface of a compound semiconductor and a dielectric insulating layer (the second dielectric layer), can be eliminated.