The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Mar. 26, 2004
Applicants:
Satoshi Ichimura, Hitachi, JP;
Masami Sakamoto, Hitachinaka, JP;
Toshio Iwasaki, Hitachi, JP;
Inventors:
Assignee:
Hitachi High-Tech Control Systems Corporation, Mito-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
For detecting a component of a substance (of liquid or solid) on a front surface of a substrate, the substrate with the substance thereon is transferred into a vaporizing section, the substance is heated in the vaporizing section so that the component is vaporized from the substance in the vaporizing section, the component vaporized is fed from the substance in the vaporizing section to a detecting section, and the vaporized component is detected in the detecting section.