The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Mar. 05, 2004
Kozo Tajiri, Suita, JP;
Shinichi Goto, Kakogawa, JP;
Yoshinobu Asako, Amagasaki, JP;
Kumiko Kawada, Tokyo, JP;
Kozo Tajiri, Suita, JP;
Shinichi Goto, Kakogawa, JP;
Yoshinobu Asako, Amagasaki, JP;
Kumiko Kawada, Tokyo, JP;
Nippon Shokubai Co., Ltd., Osaka, JP;
Abstract
A method for producing a fluorine-containing polyimide film excelling in heat resistance, resistance to chemicals, water repellency, dielectric properties, electrical properties, and optical properties and a spin coater suitable for the method are to be provided. A method for the production of a fluorine-containing polyimide film which comprises forming a coating film of a fluorine-containing polyimide precursor in an atmosphere having a relative humidity thereof adjusted to a level of not more than 50 RH % and then subjecting the fluorine-containing polyimide precursor to heat treatment thereby forming a fluorine-containing polyimide film is provided. By adjusting the relative humidity in accordance with this method, the fluorine-containing polyimide precursor can be prevented from being decomposed by the absorption of moisture and consequently prevent effectively the fluorine-containing polyimide film from forming piriform spots and scratches. Further, by forming the coating film while keeping the coating film sprayed with a gas particularly during the course of spin coating thereby giving rise to a layer of air flow on the coating film, misty substances of the coating solution generated within the spin coater can be prevented from adhering again to the coating film and consequently ensure the production of a coating film of uniform quality. This formation of the layer of air flow can be facilitated by providing the spin coater with a lid and furnishing the lid with a gas feed port.