The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Jul. 29, 2005
Yoshiyuki Hozumi, Isehara, JP;
Yoshiyuki Hozumi, Isehara, JP;
Komatsu Electronics Inc., Kanagawa, JP;
Abstract
Between a characteristic a of a process chamberhaving a large pressure loss and a characteristic b of a process chamberhaving a small pressure loss, threshold value A (flow rate value Q, pressure value P) is set on the characteristic a. The threshold value A is set on a controller. When a rotation speed of a pumpis increased by an electric motor, the flow rate of a fluid flowing through pipelinesand a flow path of a process chamberincreases. At the time, the flow rate of the fluid is measured by a flowmeterand a pressure of the fluid is measured by a pressure switch. If the pressure reaches the pressure value Pwhen the flow rate of the fluid reaches the flow rate value Q, the pressure switchoperates. At the time, the controllerjudges that the process chamberhaving a large pressure loss is connected to the pipelines. Meanwhile, if the pressure does not reach the pressure value Pwhen the flow rate of the fluid reaches the flow rate value Q, the pressure switchdoes not operate. At the time, the controllerjudges that the process chamberhaving a small pressure loss is connected to the pipelines