The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Sep. 16, 2004
Applicant:
Atsushi Furuya, Kawasaki, JP;
Inventor:
Atsushi Furuya, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 7/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
A matrix computing unit evaluates visual properties influenced by a positional relationship between surface elements of an element so that a shading effect and a re-deposition effect are reflected to the simulation results. A beam condition computing unit calculates beam conditions according to a position of the element on a wafer so that a difference in machined topologies caused by a positional difference on the wafer is reflected to the simulation results.