The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Apr. 24, 2006
Brett A. Mangrum, Dallas, TX (US);
Brett A. Mangrum, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A MEMS device includes a hinge that is disposed outwardly from a substrate and capable of at least partially supporting a conductor that is disposed outwardly from the hinge. The conductor being capable of pivoting about a first axis. The device also includes one or more electrostatic fins that are disposed inwardly from and in contact with the conductor. The one or more electrostatic fins being disposed substantially along a second axis that is different than the first axis. The MEMS device further includes one or more electrodes that are formed outwardly from the substrate and inwardly from the conductor. The one or more electrodes being separated from the conductor by a first air gap. The one or more electrodes also being separated from the one or more electrostatic fins by a second air gap that is different than the first air gap.