Micro-electro-mechanical system (mems) variable capacitor apparatuses, systems and related methods

Abstract

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced apart, and at least one of the actuation electrodes being movable when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include a first capacitive electrode attached to the first actuation electrode. The variable capacitor can also include a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of at least one of the capacitive electrodes with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes. Further, the variable capacitor can include first and second torsional beams for providing resistance to movement of the first and second capacitive electrodes with respect to one another. The torsional beams can include a first and second end. Further, the torsional beams can be fixed to one another at the first end. The torsional beams can also extend in substantially opposing directions to the second end and are attached to the second capacitive electrode.