The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
May. 25, 2005
Seiichirou Maki, Kokubu, JP;
Hiroshi Takenouchi, Kokubu, JP;
Hiroyuki Masuyama, Kokubu, JP;
Tsunehiko Nakamura, Kokubu, JP;
Seiichirou Maki, Kokubu, JP;
Hiroshi Takenouchi, Kokubu, JP;
Hiroyuki Masuyama, Kokubu, JP;
Tsunehiko Nakamura, Kokubu, JP;
Kyocera Corporation, Kyoto, JP;
Abstract
Provided is a heater capable of having a high uniform heating characteristic and substantially equally heating a wafer etc. mounted thereon, and a wafer heating device using the same, as well as a method thereof. The heater comprises a plate shaped body, a belt-like resistance heating element formed on the plate shaped body and having a channel for adjusting the resistance value, and a positioning mark formed on the plate shaped body, which serves as a reference for positioning the channel.