The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
May. 18, 2006
Ruth Yu-ai Zhang, Gilbert, AZ (US);
Raymond K. Tsui, Tempe, AZ (US);
John Tresek, Jr., Phoenix, AZ (US);
Adam M. Rawlett, Chandler, AZ (US);
Ruth Yu-Ai Zhang, Gilbert, AZ (US);
Raymond K. Tsui, Tempe, AZ (US);
John Tresek, Jr., Phoenix, AZ (US);
Adam M. Rawlett, Chandler, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A method of fabricating a nanotube structure which includes providing a substrate, providing a mask region positioned on the substrate, patterning and etching through the mask region to form at least one trench, depositing a conductive material layer within the at least one trench, depositing a solvent based nanoparticle catalyst onto the conductive material layer within the at least one trench, removing the mask region and subsequent layers grown thereon using a lift-off process, and forming at least one nanotube electrically connected to the conductive material layer using chemical vapor deposition with a methane precursor.