The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 15, 2008

Filed:

Jun. 28, 2004
Applicants:

Ikuo Arata, Hamamatsu, JP;

Shigeru Sakamoto, Hamamatsu, JP;

Hirotoshi Terada, Hamamatsu, JP;

Inventors:

Ikuo Arata, Hamamatsu, JP;

Shigeru Sakamoto, Hamamatsu, JP;

Hirotoshi Terada, Hamamatsu, JP;

Assignee:

Hamamatsu Photonics K.K., Shizuoka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S), and a solid immersion lens is set thereon (S). The inserted position of the solid immersion lens is then adjusted (S). The optical contact liquid is then dried (S), and thereby the solid immersion lens is brought into optically-close contact with the semiconductor device. As a result, a sample observation method and a microscope or the like can be realized, in which the solid immersion lens can be easily aligned to a desired position on the sample, and the solid immersion lens can be securely brought into optically-close contact with the sample.


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