The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 15, 2008

Filed:

Apr. 10, 2002
Applicants:

Frank Holler, Aalen, DE;

Jurgen Werner, Aalen, DE;

Edward Gumbrell, Aalen, DE;

Michael Spieweck, Aalen, DE;

Inventors:

Frank Holler, Aalen, DE;

Jurgen Werner, Aalen, DE;

Edward Gumbrell, Aalen, DE;

Michael Spieweck, Aalen, DE;

Assignee:

Carl Zeiss AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/86 (2006.01); G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system and a method for determining a position of two objects relative to each other is suggested, comprising: a sourceof coherent radiation, a beam guidance for providing a measuring branchfor a measuring beam, which has an optical path length dependent on the position of the two objects, a radiation intensity sensorfor measuring an intensity of an interfering superposition of radiation, which include radiation at least after passing through the measuring branch, and a calculatorwhich responds to a measuring signal from the radiation intensity sensor, in order to detect optical path lengths of the measuring branchand therefrom to detect the position of the two objects relative to each other, wherein the measuring branchincludes: at least one emitter fixedly mountable on a first of the two objects for emitting radiation supplied to the measuring branchin a space between the two objects, at least three retroreflectorsmountable on the second one of the two objects, such that they are arranged at fixed distances relative to each other, and at least one receivermountable on the first of the two objects for receiving radiation reflected back by the retroreflectorsand for supplying the received radiation to the radiation intensity sensor, wherein the emitteremits the radiation into such an angular area that the at least three retroreflectorsare contained therein.


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