The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2008
Filed:
Jun. 08, 2005
Thomas Hecht, Dresden, DE;
Stefan Jakschik, Dresden, DE;
Uwe Schröder, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Abstract
The present invention provides a coating process for patterned substrate surfaces, in which a substrate () is provided, the substrate having a surface () which is patterned in a substrate patterning region () and has one or more trenches () that are to be filled to a predetermined filling height (), a catalyst layer () is introduced into the trenches () that are to be filled, a reaction layer () is deposited catalytically in the trenches () that are to be filled, the catalytically deposited reaction layer () is densified in the trenches () that are to be filled, and the introduction of the catalyst layer () and the catalytic deposition of the reaction layer () are repeated until the trenches () that are to be filled have been filled to the predetermined filling height ().