The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2008
Filed:
Feb. 14, 2005
Maki Ito, Suwa, JP;
Xin-shan LI, Suwa, JP;
Masami Murai, Suwa, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film) formed on the one surface of a passage-forming substrate, and a second oxide film (insulation film) formed on the first oxide filmby use of a sputtering method. In only a part of an interface between the first and second oxide filmsand, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide filmand a second element that is a constituent element other than oxygen included in the second oxide filmand which is a layer in which a proportion of the first element is lower than that in the first oxide filmand a proportion of the second element is lower than that in the second oxide film. A proportion of the altered layer in the entire interface between the first and second oxide filmsandis not more than 10%.