The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 15, 2008

Filed:

Dec. 07, 2004
Applicants:

Masanao Fujii, Kawasaki, JP;

Toru Okada, Kawasaki, JP;

Masayuki Kitajima, Kawasaki, JP;

Hidehiko Kobayashi, Kawasaki, JP;

Seiichi Shimoura, Kawasaki, JP;

Inventors:

Masanao Fujii, Kawasaki, JP;

Toru Okada, Kawasaki, JP;

Masayuki Kitajima, Kawasaki, JP;

Hidehiko Kobayashi, Kawasaki, JP;

Seiichi Shimoura, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2006.01); H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a method of producing a micro-actuator, a first adhesive is applied to a movable plate, and a movable, and a movable electrode is placed on the first adhesive. A second adhesive is applied to the movable electrode, and a piezoelectric element is placed on the second adhesive. Next, a third adhesive is applied to an actuator base, a base electrode is placed on the third adhesive, and the third adhesive is semi-cured in the same manner as above. A fourth adhesive is applied to the base electrode, the piezoelectric element is placed on the fourth adhesive, and the fourth adhesive is semi-cured in the same manner as above. Finally, the adhered laminate thus obtained is placed into a heating furnace and heated at a predetermined temperature for a predetermined period of time to thereby fully cure the adhesives.


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