The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7354810 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 08, 2008

Filed:

May. 28, 2004
Applicants:

Hiromichi Takaoka, Tokyo, JP;

Mitsuru Nakata, Tokyo, JP;

Inventors:

Hiromichi Takaoka, Tokyo, JP;

Mitsuru Nakata, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of manufacturing a semiconductor thin film includes (A) forming an amorphous semiconductor film on a substrate, (B) irradiating a beam to a surface of the amorphous semiconductor film such that a predetermined region of the amorphous semiconductor film is melted and solidified to form a crystallized semiconductor film, and (C) scanning the beam in a first direction. A second direction is a direction on the surface of the amorphous semiconductor film perpendicular to the first direction. A length along the second direction of a cross section of the beam is substantially equal to or less than two times a width along the second direction of the crystallized semiconductor film.


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Takaoka, Hiromichi. (2008). Method of and apparatus for manufacturing semiconductor thin film, and method of manufacturing thin film transistor (U.S. Patent No. 7354810). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7354810

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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