The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2008

Filed:

Mar. 30, 2005
Applicants:

John L. Dunec, Palo Alto, CA (US);

Eric Peeters, Fremont, CA (US);

Armin R. Volkel, Palo Alto, CA (US);

Michel A. Rosa, Santa Clara, CA (US);

Dirk Debruyker, Palo Alto, CA (US);

Thomas Hantschel, Menlo Park, CA (US);

Inventors:

John L. Dunec, Palo Alto, CA (US);

Eric Peeters, Fremont, CA (US);

Armin R. Volkel, Palo Alto, CA (US);

Michel A. Rosa, Santa Clara, CA (US);

Dirk DeBruyker, Palo Alto, CA (US);

Thomas Hantschel, Menlo Park, CA (US);

Assignee:

Xerox Corporation, Norwalk, CT (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.


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