The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
Sep. 08, 2004
Yoshimasa Miyajima, Kasugai, JP;
Ariyoshi Shibata, Kasugai, JP;
Joji Hasegawa, Kasugai, JP;
Tetsuji Kadowaki, Kasugai, JP;
Yoshimasa Miyajima, Kasugai, JP;
Ariyoshi Shibata, Kasugai, JP;
Joji Hasegawa, Kasugai, JP;
Tetsuji Kadowaki, Kasugai, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
An apparatus for manufacturing a laminated substrate with a simple structure and with satisfactory yield. First and second holding plates each attract substrates without contacting a laminating surface of the two substrates. A substrate conveying device conveys the substrates into the processing chamber. The substrate conveying device attracts only the surface of a substrate that is opposite to the laminating surface, transfers the substrate to a holding plate, and receives the substrate from the holding plate.