The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
Jun. 03, 2005
Kazutoshi Maehara, Chiba-ken, JP;
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Kentaro Wada, Chiba-ken, JP;
Mark A. Fodor, Redwood City, CA (US);
Andrzei Kaszuba, San Jose, CA (US);
Kazutoshi Maehara, Chiba-ken, JP;
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Kentaro Wada, Chiba-ken, JP;
Mark A. Fodor, Redwood City, CA (US);
Andrzei Kaszuba, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.