The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Nov. 22, 2005
Masato Yamada, Inuyama, JP;
Hitoshi Terasaki, Gifu, JP;
Yoichi Tsuchiya, Hashima, JP;
Shuichi Ichiura, Hashima, JP;
Masahiro Higuchi, Gifu, JP;
Mikio Ichihashi, Hashima, JP;
Youichiro Goto, Gifu, JP;
Yoshiaki Maeno, Mizuho, JP;
Masato Yamada, Inuyama, JP;
Hitoshi Terasaki, Gifu, JP;
Yoichi Tsuchiya, Hashima, JP;
Shuichi Ichiura, Hashima, JP;
Masahiro Higuchi, Gifu, JP;
Mikio Ichihashi, Hashima, JP;
Youichiro Goto, Gifu, JP;
Yoshiaki Maeno, Mizuho, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
In a beam irradiation device of the present invention, laser beams emitted from a semiconductor laser impinge on an irradiation lens supported by a lens actuator. The laser beams that have passed through the irradiation lens change in outgoing angle in the direction of a y-z plane as the lens actuator is driven. A laser beam scan in the target region is thus performed. A part of the laser beams that have passed through the irradiation lens is reflected and separated by a beam splitter. The separated beams are converged on a PSD through a converging lens. A DSP control circuit monitors a scan position of the laser beams that have passed through the irradiation lens based on a signal from the PSD. When an irradiation position has deviated from a scan trajectory, the DSP control circuit controls an actuator driving circuit to draw the irradiation position back onto the scan trajectory. This beam irradiation device can realize a smooth and stable beam scan operation with a simple construction.