The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Jun. 20, 2005
Applicants:
Werner Kröninger, Albersdorf, DE;
Manfred Schneegans, Vaterstetten, DE;
Inventors:
Werner Kröninger, Albersdorf, DE;
Manfred Schneegans, Vaterstetten, DE;
Assignee:
Infineon Technologies, Inc., Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 11/12 (2006.01); G03F 7/34 (2006.01); G03F 7/42 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method in which a resist layer is applied to a base layer is disclosed. The resist layer includes an adhesive material, and the adhesive force of the adhesive material decreases or increases during an irradiation process. Residues of the resist layer may be stripped using the disclosed method.