The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7351346 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 01, 2008

Filed:

Nov. 30, 2004
Applicant:

Michael J. Little, Oak Park, CA (US);

Inventor:

Michael J. Little, Oak Park, CA (US);

Assignee:

Agoura Technologies, Inc., El Dorado Hills, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for forming a plurality of parallel metal lines on a substrate of thin film elastomeric material and a wire grid polarizer formed by such method. A sacrificial layer is formed by coating the substrate with a water soluble polymer while the substrate is stretched. The existing tensile force is removed, leaving an undulating topology of buckled sacrificial layer material. A masking layer is then deposited at an oblique angle and then fractured into parallel lines of material by application of a second tensile force. Unmasked portions of the sacrificial layer are removed by dry etch. A metallic layer is then deposited and a lift off process employed to remove remaining portions of the sacrificial layer and materials deposited thereover. Upon removal of the second tensile force, the substrate returns to its unstressed length with metal lines of predetermined periodicity thereon.


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Little, Michael. (2008). Non-photolithographic method for forming a wire grid polarizer for optical and infrared wavelengths (U.S. Patent No. 7351346). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7351346

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