The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Jan. 18, 2005
Roland Bernard, Vuiz-la-Chiesaz, FR;
Hisanori Kambara, Villy-le-Pelloux, FR;
Amaud Favre, Annecy, FR;
Roland Bernard, Vuiz-la-Chiesaz, FR;
Hisanori Kambara, Villy-le-Pelloux, FR;
Amaud Favre, Annecy, FR;
Alcatel, Paris, FR;
Abstract
A SMIF type mini-environment () can be connected onto a purge station (). The purge station comprises a leaktight purge compartment () whose top face includes a closable transfer passage () facing the bottom face () of the mini-environment pod (). An elevator () is suitable for vertically displacing the bottom wall () of the mini-environment pod () when coupled thereto, simultaneously moving the stack () of substrate wafers carried by the bottom wall () so as to introduce them together into the leaktight purge compartment (). The stack () of substrate wafers is then purged inside a leaktight purge compartment () of the purge station (), while simultaneously purging the mini-environment pod (). This provides purging that is much more effective and much faster, thus encouraging the use of SMIF mini-environment pods in microelectronic processes.