The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Feb. 18, 2004
Sipke Wadman, Eindhoven, NL;
Sipke Wadman, Eindhoven, NL;
Koninklijke Philips Electronics, N.V., Eindhoven, NL;
Abstract
A scatterometer comprising light source means () for providing an incident light beam () at different angles in the direction of a sample () to be analyzed, and a concave screen () for receiving the reflection () of the incident light beam (). The screen () has substantially the shape of a portion of a sphere, for example a hemisphere, whereby the location of the sample () is in its center. The screen () having an aperture () through which the incident light beam () passes towards said sample (). Said light source means () and at least a portion of the screen () including said aperture () can rotate relative to the sample (), around an axis () through said center and substantial perpendicular to said direction of the incident radiation beam.