The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Jul. 29, 2004
Kenji Inoue, Tokyo, JP;
Hisatoshi Saitou, Tokyo, JP;
Kenji Inoue, Tokyo, JP;
Hisatoshi Saitou, Tokyo, JP;
TDK Corporation, Chuo-ku, Tokyo, JP;
Abstract
A piezoelectric resonator includes; a lower electrodeformed on a substrate; a piezoelectric filmformed on the lower electrode; an upper electrodeformed on the piezoelectric filmand obtaining, in collaboration with the lower electrode, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film; and an acoustic multilayer reflective filmincluding an SiOfilmhaving a predetermined acoustic impedance and an AIN filmhaving an acoustic impedance higher than the SiOfilm, and reflecting the bulk acoustic wave, the SiOfilmand the AIN filmbeing alternately stacked on the upper electrode, and the SiOfilmbeing in contact with the upper electrode