The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Aug. 08, 2005
Kirill V. Shcheglov, Los Angeles, CA (US);
A. Dorian Challoner, Manhattan Beach, CA (US);
Ken J. Hayworth, Northridge, CA (US);
Dean V. Wiberg, La Crescenta, CA (US);
Karl Y. Yee, Pasadena, CA (US);
Kirill V. Shcheglov, Los Angeles, CA (US);
A. Dorian Challoner, Manhattan Beach, CA (US);
Ken J. Hayworth, Northridge, CA (US);
Dean V. Wiberg, La Crescenta, CA (US);
Karl Y. Yee, Pasadena, CA (US);
The Boeing Company, Chicago, IL (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.