The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2008

Filed:

Nov. 10, 2006
Applicants:

Tetsuya Fukuda, Niigata-ken, JP;

Katsuya Kikuiri, Niigata-ken, JP;

Kiyoshi Sato, Niigata-ken, JP;

Yoshinobu Nakamura, Niigata-ken, JP;

Hiroyuki Kobayashi, Niigata-ken, JP;

Inventors:

Tetsuya Fukuda, Niigata-ken, JP;

Katsuya Kikuiri, Niigata-ken, JP;

Kiyoshi Sato, Niigata-ken, JP;

Yoshinobu Nakamura, Niigata-ken, JP;

Hiroyuki Kobayashi, Niigata-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 7/00 (2006.01); G01I 9/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A recessed portion is provided to form a cavity on one of the pair of principal surfaces. A first protruding portion provided in the recessed portion. A first silicon substrate has a fixed electrode formed on the first protruding portion, and a movable electrode disposed with a predetermined interval between the fixed electrode and the movable electrode.


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