The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Jul. 07, 2005
Michiko Nakanishi, Tokyo, JP;
Akio Kobayashi, Tokyo, JP;
Isao Minegishi, Tokyo, JP;
Ayako Iijima, Tokyo, JP;
Michiko Nakanishi, Tokyo, JP;
Akio Kobayashi, Tokyo, JP;
Isao Minegishi, Tokyo, JP;
Ayako Iijima, Tokyo, JP;
Topcon Corporation, Tokyo, JP;
Abstract
A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substratehaving a plurality of electrodes (and) formed on a surface of the electrode substrate; a silicon membranehaving a counter electrode opposed to the plurality of electrodes formed on the electrode substrate; a reflection sectionprovided on the side of the silicon membraneopposite the counter electrode; and a support plateintegrally bonded to the electrode substratefor restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane, in which a plurality of layers of wiring patterns (and) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate