The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Dec. 20, 2004
Mareike Katharine Klee, Hueckelhoven, DE;
Theodoor Gertrudis Silvester Maria Rijks, Eindhoven, NL;
Pieter Lok, Nijmegen, NL;
Ruediger Guenter Mauczok, Erkelenz, DE;
Mareike Katharine Klee, Hueckelhoven, DE;
Theodoor Gertrudis Silvester Maria Rijks, Eindhoven, NL;
Pieter Lok, Nijmegen, NL;
Ruediger Guenter Mauczok, Erkelenz, DE;
NXP B.V., Eindhoven, NL;
Abstract
The microelectromechanical system (MEMS) element () comprises a first electrode () that is present on a surface of substrate () and a movable element (). This overlies at least partially the first electrode () and comprises a piezoelectric actuator, which movable element () is movable towards and from the substrate () by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate () by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer () that is on opposite surfaces provided with a second and a third electrode () respectively, said second electrode () facing the substrate () and said third electrode () forming an input electrode of the MEMS element (), so that a current path through the MEMS element () comprises the piezoelectric layer () and the tunable gap.