The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Mar. 24, 2005
Kyoko Imai, Utsunomiya, JP;
Kenji Ando, Utsunomiya, JP;
Hidehiro Kanazawa, Tokyo, JP;
Koji Teranishi, Utsunomiya, JP;
Takayuki Miura, Utsunomiya, JP;
Kazue Takata, Utsunomiya, JP;
Kyoko Imai, Utsunomiya, JP;
Kenji Ando, Utsunomiya, JP;
Hidehiro Kanazawa, Tokyo, JP;
Koji Teranishi, Utsunomiya, JP;
Takayuki Miura, Utsunomiya, JP;
Kazue Takata, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A multilayer film reflector for X-rays has alternately stacked layers formed on a substrate and comprising a layer (high refractive index layer) comprising a material having a large difference between a refractive index to soft X-ray and a refractive index in vacuum, and a layer (low refractive index layer) comprising a material having a small difference between a refractive index to soft X-ray and a refractive index in vacuum, wherein at least one intermediate layer having a crystalline structure is provided between the low refractive index layer and the high refractive index layer. Thereby, the crystallization of the low refractive index layer is promoted, the refractive index of the low refractive index layer is lowered, so that the reflectance of the multilayer film reflector is improved.