The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Feb. 08, 2006
Takeshi Soeda, Kawasaki, JP;
Takeshi Soeda, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A convergent electron beam is incident on an evaluation region of a crystalline material to obtain a HOLZ pattern formed by the convergent electron beam transmitted to the crystalline material (Steps Sto S), a split width of the HOLZ line of the obtained HOLZ pattern is computed (Step S), and a stress in the evaluation region of the crystalline material is evaluated based on the split width of the HOLZ line (Step S). Thus, the stress measuring method and system can measure with good precision a local lattice strain amount and stress value of the crystalline material, and a stress value of a stress source applying a stress to the crystalline material.