The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Apr. 07, 2005
Applicants:
Hirokazu Tokuno, Cupertino, CA (US);
Minh-van Ngo, Fremont, CA (US);
Angela T. Hui, Fremont, CA (US);
Cinti Xiaohua Chen, Fremont, CA (US);
Inventors:
Hirokazu Tokuno, Cupertino, CA (US);
Minh-Van Ngo, Fremont, CA (US);
Angela T. Hui, Fremont, CA (US);
Cinti Xiaohua Chen, Fremont, CA (US);
Assignees:
Spansion LLC, Sunnyvale, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method includes forming a group of disposable hard mask structures on a semiconductor device that includes a group of memory cells. The method further includes using the disposable hard mask structures to precisely control a junction profile of the memory cells.