The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Dec. 15, 2004
Applicants:
Takahiro Kimura, Kawasaki, JP;
Chihiro Uchibori, Kawasaki, JP;
Inventors:
Takahiro Kimura, Kawasaki, JP;
Chihiro Uchibori, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/283 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device manufacturing method comprises the steps of forming a metal film () on an organic interlayer insulating film () formed over a semiconductor substrate to get a metal diffusion preventing metal carbide film () on a boundary between the organic interlayer insulating film () and the metal film (), and leaving the metal carbide film () on the organic interlayer insulating film () by removing selectively the metal film () from the metal carbide film ().